Doctor of Engineering
Email :0a998994768e1f6b8555b16483c15ebb684fdba44d72d59d0df0f8114ca3a1566504958da5a4aa06daa74b4b74949a237a8c4e0affc86d96cf7653b16cd643158d52614366c6f2e04dc465c73464b79ced6bd97576da1b8df0571039500ca31746b0ec52109142fec42d589f404b1b2b369d9e7c386f55032a64828b6e229c6e
Service Invention or Not:no
Pre One:(33) 潘继生,高雅欣,阎秋生. 一种超声电化学复合的晶片清洗装置及其清洗方法[P]. CN111092033A,2020-05-01.Next One:(35) 潘继生,卓志佳,阎秋生. 一种半导体基片用声光磁复合抛光装置及抛光方法[P]. CN110948293A,2020-04-03.
